Method for an improved checking of repeatability and reproducibility of a measuring chain for semiconductor device testing
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United States of America Patent
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Jan 6, 2015
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Apr 22, 2011
filing date -
Oct 22, 2008
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Abstract
A method provides an improved checking of repeatability and reproducibility of a measuring chain, in particular for quality control by semiconductor device testing. The method includes testing steps provided for multiple and different devices to be subjected to measurement or control through a measuring system that includes at least one chain of measuring units between a testing apparatus (ATE) and each device to be subjected to measurement or control. Advantageously, the method comprises checking repeatability and reproducibility of each type of unit that forms part of the measuring chain and, after the checking, making a correlation between the various measuring chains as a whole to check repeatability and reproducibility, using a corresponding device subjected to measurement or control.
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