Measurement apparatus, exposure apparatus, and device fabrication method

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United States of America Patent

PATENT NO 8928882
SERIAL NO

13428001

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Abstract

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The present invention provides a measurement apparatus which measures a position of a second object relative to a first object, the apparatus including a first measurement unit which includes a diffraction grating provided on the first object, and a first head and a second head provided on the second object, and is configured to measure the position of the second object relative to the first object by the first head or the second head, and a processing unit configured to perform a process of obtaining the position of the second object relative to the first object.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Imaoka, Nobuo Utsunomiya, JP 4 11

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