Liquid flow controller and precision dispense apparatus and system

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United States of America Patent

PATENT NO 8939428
APP PUB NO 20130220452A1
SERIAL NO

13853674

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.

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Patent Owner(s)

  • ENTEGRIS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gashgaee, Iraj Marlborough, US 28 1749
Gonnella, George Pepperell, US 33 2086
Laverdiere, Marc Wakefiled, US 33 1719
Marrs, Jennifer Cornish, US 4 1329
McLoughlin, Robert F Pelham, US 34 1584

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