Method for treating spent abrasive slurry

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United States of America Patent

PATENT NO 8940174
APP PUB NO 20100170161A1
SERIAL NO

12299017

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Abstract

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A method for treating spent abrasive slurry obtained from cutting a body of a substrate material into wafer-like slices, the slurry comprising a lubricant fluid, unspent abrasive particles and fines, is disclosed, method comprising separating the spent slurry in a first sedimentation step into a solids concentrate comprising unspent abrasive particles and a solids depleted slurry; and subsequently separating the solids depleted slurry by cross-flow filtration into a fines containing fraction and a solids and fines depleted regenerated lubricant fluid.

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Patent Owner(s)

  • PALL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berndt, Rolf Dietzenbach, DE 3 13
Ruth, Jochen Buedingen, DE 1 2

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