Method of producing a microacoustic component

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United States of America Patent

PATENT NO 8940359
APP PUB NO 20120056507A1
SERIAL NO

13223892

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Abstract

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The microacoustic component has a substrate that has at least one layer (composed of a dielectric or piezoelectric material, and a metallic strip structure. The layer is composed of a dielectric or piezoelectric material and/or the metallic strip structure have/has been produced or can be produced by the atomic layer deposition method.

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Patent Owner(s)

  • SNAPTRACK, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eggs, Christoph Rattenkirchen, DE 11 136
Henn, Gudrun Ebenhausen, DE 14 61
Menzel, Siegfried Lausitz, DE 2 6
Ruile, Werner Munich, DE 65 890
Scheinbacher, Guenter Baldham, DE 2 4
Spindler, Mario Dresden, DE 1 4

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