Microelectromechanical optical shutter system
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United States of America Patent
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Jan 27, 2015
Grant Date -
Jun 28, 2012
app pub date -
Dec 8, 2010
filing date -
Dec 8, 2010
priority date (Note) -
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Abstract
A microelectromechanical shutter system includes an actuator beam formed in a substrate, at least one actuator electrode spaced apart and electrically isolated from the actuator beam, the at least one actuator electrode angling away from a base of the actuator beam to actuate the actuator beam using a zipper action, and a fiber-optic channel in the substrate to receive a fiber-optic cable. A shutter mirror is included on a distal end of the actuator beam, with the shutter mirror in substantial alignment with a centerline of the fiber-optic channel. Upon application of a voltage between the actuator beam and the at least one actuator electrode, an electrostatic force is created between them to move the shutter mirror across the end of the fiber-optic channel.
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