Assembling and applying nano-electro-mechanical systems

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United States of America Patent

PATENT NO 8945970
SERIAL NO

12442269

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Abstract

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A method of constructing devices using semiconductor manufacturing processes includes fabricating a device having a movable portion and a fixed portion. The movable portion is connected to the fixed portion only through at least one sacrificial layer. The sacrificial layer is removed in the presence of a force of sufficient strength so as to controllably reposition the movable portion during the release process. The force can be externally applied, generated locally as a result of, for example, the relative positions of the fixed and movable portions, or some combination of the two. Several devices constructed according to such a method are also disclosed.

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Patent Owner(s)

  • CARNEGIE MELLON UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Carley, L Richard Sewickley, US 30 1001

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