Superjunction devices having narrow surface layout of terminal structures, buried contact regions and trench gates
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United States of America Patent
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Feb 3, 2015
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app pub date -
Apr 5, 2013
filing date -
Apr 5, 2012
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Abstract
Superjunction semiconductor devices having narrow surface layout of terminal structures and methods of manufacturing the devices are provided. The narrow surface layout of terminal structures is achieved, in part, by connecting a source electrode to a body contact region within a semiconductor substrate at a body contact interface comprising at least a first side of the body contact region other than a portion of a first main surface of the semiconductor substrate.
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