Thermal diffusion chamber control device and method

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United States of America Patent

PATENT NO 8950470
APP PUB NO 20120168144A1
SERIAL NO

12982370

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Abstract

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Preferably, obtaining internal and external thermal measurement values of a sealed process chamber allows a control system to generate a control signal based on a comparison of the internal and external thermal measurement values to the predetermined value. The control signal is provided to a fluid handling system, wherein the fluid handling system modulates flow of a first fluid around the exterior of the sealed process chamber. The control signal is further provided to a closed loop heat exchange system, wherein the closed loop heat exchange system modulates flow of a second fluid within an interior cavity of the sealed process chamber based on the control signal. The control signal is still further provided to an open loop heat exchange system, wherein the open loop heat exchange system modulates flow of a third fluid within the interior of cavity of the sealed process chamber.

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Patent Owner(s)

Patent OwnerAddress
POOLE VENTURA INC800 N DEL NORTE BLVD OXNARD CA 93730

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Custer,, III Arthur W Ventura, US 11 20
Dingus, Aaron L Moorpark, US 9 19
Erickson, Mark R Newbury Park, US 18 283
Jamshidi, Nader Newbury Park, US 10 19
Poole, Henry J Ventura, US 11 20

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