Liquid droplet jetting apparatus and piezoelectric actuator
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United States of America Patent
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Feb 17, 2015
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app pub date -
Mar 26, 2013
filing date -
Apr 27, 2012
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Abstract
A liquid droplet jetting apparatus includes a flow passage structural body having a nozzle and a pressure chamber communicated with the nozzle, and a piezoelectric actuator provided on the flow passage structural body to apply jetting energy to a liquid inside the pressure chamber. The piezoelectric actuator has a piezoelectric layer arranged to face the pressure chamber, a low-potential electrode provided on the piezoelectric layer, and a high-potential electrode provided on the piezoelectric layer and to which a higher potential is applied than to the low-potential electrode. The high-potential electrode has a first electrode layer arranged to contact with the piezoelectric layer and formed of gold, and a second electrode layer stacked on the first electrode layer to extend in a predetermined direction, having a width shorter than that of the first electrode layer, and formed of a conductive material more likely to cause migration than gold.
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