Energy harvesting devices and methods of fabricating the same
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United States of America Patent
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Feb 24, 2015
Grant Date -
Jun 20, 2013
app pub date -
Sep 7, 2012
filing date -
Dec 16, 2011
priority date (Note) -
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Abstract
Energy harvesting devices are provided. The energy harvesting device includes a body, a proof mass spaced apart from the body, a cantilever extending from the body onto the proof mass, a first electrode layer on the cantilever opposite to the body, a first piezoelectric layer on the first electrode layer, a second electrode layer on the first piezoelectric layer, a second piezoelectric layer on the second electrode layer, a pair of third electrode layers on the second piezoelectric layer, and a magnetic layer between the second electrode layer and the second piezoelectric layer. Related methods are also provided.
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