Four terminal nano-electromechanical switch with a single mechanical contact
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United States of America Patent
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Feb 24, 2015
Grant Date -
Mar 6, 2014
app pub date -
Aug 26, 2013
filing date -
Aug 31, 2012
priority date (Note) -
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Abstract
A nano-electro-mechanical switch includes an input electrode, a body electrode, an insulating layer, an actuator electrode, an output electrode, and a cantilever beam adapted to flex in response to an actuation voltage applied between the body electrode and the actuator electrode. The cantilever beam includes the input electrode, the body electrode and the insulating layer, the latter separating the body electrode from the input electrode, the cantilever beam being configured such that, upon flexion of the cantilever beam, the input electrode comes in contact with the output electrode at a single mechanical contact point at the level of an end of the cantilever beam.
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