Electro-optic device, method of producing electro-optic device, and projection type display apparatus

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United States of America Patent

PATENT NO 8964147
APP PUB NO 20130021540A1
SERIAL NO

13547122

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An electro-optic device is provided. In the electro-optic device, when a groove is sealed to be hollow, a sacrificial film is formed in the groove before forming a first sealing film, the first sealing film is formed, and then the sacrificial film is removed through a penetration portion of the first sealing film. A second sealing film is formed on the first sealing film, and the penetration portion of the first sealing film is blocked by the second sealing film. For this reason, it is possible to form the first sealing film to block an opening portion of the groove, and it is possible to prevent the first sealing film from being formed up to the inside of the groove.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Satoshi Eniwa, JP 325 2531
Ono, Yohei Chitose, JP 46 257

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