Resonator including a passivation layer, a vibrating sensor including such a resonator, and a method of manufacture
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United States of America Patent
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Mar 3, 2015
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app pub date -
Nov 10, 2010
filing date -
Nov 12, 2009
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Abstract
A resonator has a body of silicon-based material with at least one resonant part having at least one portion covered in an electrical conduction layer and at least one portion not covered in a conduction layer. The portion of the resonator not covered in a conduction layer is covered in a passivation layer in such a manner that, in the resonant part, the silicon-based material is completely covered by the conduction layer and by the passivation layer in combination. A vibrating sensor is also provided which includes such a resonator and a method of fabricating the resonator.
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