Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids

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United States of America Patent

PATENT NO 8967167
APP PUB NO 20130032182A1
SERIAL NO

13649755

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Abstract

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The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.

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Patent Owner(s)

  • TEL FSI, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Collins, Jimmy D Allen, US 16 228
DeKraker, David P Burnsville, US 6 22
Gast, Tracy A Waconia, US 16 164
Rose, Alan D Wylie, US 19 856

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