Wafer container cleaning device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 3, 2015
Grant Date -
Nov 24, 2011
app pub date -
Jan 24, 2011
filing date -
May 18, 2010
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A wafer container cleaning device for cleaning container bodies and container covers of wafer containers includes a housing having a cleaning chamber defined therein, a rotor rotatably installed within the cleaning chamber of the housing, a plurality of container holders mounted to the rotor to removably hold the container bodies and the container covers, and a cleaning solution sprayer nozzle for spraying a cleaning solution toward the container bodies and the container covers held by the container holders. Each of the container holders includes a support tray having a body support portion for supporting each of the container bodies in an upside down state and a cover support portion for supporting each of the container covers.
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