Forming a device having a curved piezoelectric membrane

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United States of America Patent

PATENT NO 8969105
APP PUB NO 20130210175A1
SERIAL NO

13810696

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Abstract

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Processes for forming an actuator having a curved piezoelectric membrane are disclosed. The processes utilize a profile-transferring substrate having a curved surface surrounded by a planar surface to form the curved piezoelectric membrane. The piezoelectric material used for the piezoelectric actuator is deposited on at least the curved surface of the profile-transferring substrate before the profile-transferring substrate is removed from the underside of the curved piezoelectric membrane. The resulting curved piezoelectric membrane includes grain structures that are columnar and aligned, and all or substantially all of the columnar grains are locally perpendicular to the curved surface of the piezoelectric membrane.

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Patent Owner(s)

  • FUJIFILM CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bibl, Andreas Los Altos, US 264 11065
Birkmeyer, Jeffrey San Jose, US 37 439
Chen, Zhenfang Sunnyvale, US 24 182
De, Brabander Gregory San Jose, US 9 83
Hoisington, Paul A Hanover, US 151 2307
Nepomnishy, Mark San Jose, US 20 123
Ottosson, Mats G Saltsjo-Boo, SE 25 305
Sugimoto, Shinya San Jose, US 52 123

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