Nitride semiconductor device, nitride semiconductor wafer and method for manufacturing nitride semiconductor layer

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United States of America Patent

PATENT NO 8969891
APP PUB NO 20140231824A1
SERIAL NO

14263503

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According to one embodiment, a nitride semiconductor device includes a foundation layer and a functional layer. The foundation layer is formed on an Al-containing nitride semiconductor layer formed on a silicon substrate. The foundation layer has a thickness not less than 1 micrometer and including GaN. The functional layer is provided on the foundation layer. The functional layer includes a first semiconductor layer. The first semiconductor layer has an impurity concentration higher than an impurity concentration in the foundation layer and includes GaN of a first conductivity type.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hung, Hung Kanagawa-ken, JP 59 110
Hwang, Jongil Kanagawa-ken, JP 36 409
Nunoue, Shinya Chiba-ken, JP 312 3276
Sato, Taisuke Kanagawa-ken, JP 50 1552
Shioda, Tomonari Kanagawa-ken, JP 41 187
Sugiyama, Naoharu Kanagawa-ken, JP 86 2170

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