Metallization mixtures and electronic devices

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United States of America Patent

PATENT NO 8970027
APP PUB NO 20140034370A1
SERIAL NO

13964065

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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One aspect of the present invention is a method of processing a substrate. In one embodiment, the method comprises forming an electrical conductor on or in the substrate by providing a mixture comprising metal particles and an electroless deposition solution and electrolessly depositing a metal matrix and co-depositing the metal particles. In another embodiment, the method comprises forming an electrical conductor on or in the substrate by providing a mixture comprising metal particles and an electrochemical plating solution and electrochemically plating a metal matrix and co-depositing the metal particles. Another aspect of the present invention is a mixture for the formation of an electrical conductor on or in a substrate. Another aspect of the present invention is an electronic device.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kolics, Artur Fremont, US 74 1323
Redeker, Fritz Fremont, US 46 855

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