Tunable interference filter, optical module, and electronic device
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United States of America Patent
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Mar 3, 2015
Grant Date -
Aug 23, 2012
app pub date -
Feb 16, 2012
filing date -
Feb 17, 2011
priority date (Note) -
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Abstract
An etalon (tunable interference filter) includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflection film disposed on the fixed substrate, a movable reflection film disposed on the movable substrate and facing the fixed reflection film via a gap, a fixed electrode disposed on the fixed substrate, and a movable electrode disposed on the movable substrate and facing the fixed electrode. A movable insulating film is stacked on a surface of the movable electrode on the side of the fixed electrode, the movable electrode has a compressive stress, and the movable insulating film has a tensile stress.
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