Imprint method and imprint apparatus

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United States of America Patent

PATENT NO 8973494
APP PUB NO 20110192300A1
SERIAL NO

13023225

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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According to one embodiment, an imprint method is disclosed. The method can include forming a liquid droplet of a transfer material with a volume greater than a predetermined reference volume by dropping the transfer material onto a major surface of a processing substrate. The method can include reducing the volume of the liquid droplet to be less than the reference volume by volatilizing the liquid droplet. In addition, the method can include filling the transfer material into a recess provided in a transfer surface of a template by bringing the liquid droplet having the volume reduced to be less than the reference volume into contact with the transfer surface of the template.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatano, Masayuki Kanagawa-ken, JP 51 383
Nakasugi, Tetsuro Kanagawa-ken, JP 66 588
Ooki, Kenji Kanagawa-ken, JP 18 295
Yoneda, Ikuo Kanagawa-ken, JP 55 558

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