Fluid control device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8973615
APP PUB NO 20020031417A1
SERIAL NO

09893522

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Rails 20 corresponding to lines A, B, C are provided in parallel on a bass plate 1, and coupling members 21, 22 are slidably mounted on each of the rails 20. Each of fluid controllers 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 is mounted generally on two of these coupling members 21, 22.

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First Claim

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Patent Owner(s)

  • CKD CORPORATION;FUJIKIN INCORPORATED;TOKYO ELECTRON LIMITED

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goshima, Kenichi Komaki, JP 7 575
Hoshi, George Tsukui-gun, JP 6 857
Kawano, Yuji Osaka, JP 55 1129
Kobayashi, Hideo Komaki, JP 414 4461
Nagaya, Akinori Komaki, JP 2 476
Okabe, Tsuneyuki Tsukui-gun, JP 50 967
Yamaji, Michio Osaka, JP 158 2985
Yoshikawa, Kazuhiro Osaka, JP 116 1381

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