Method of manufacturing micro structure, and substrate structure
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United States of America Patent
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Mar 10, 2015
Grant Date -
Sep 29, 2011
app pub date -
Mar 22, 2011
filing date -
Mar 23, 2010
priority date (Note) -
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Abstract
A method of manufacturing a micro structure, includes the steps of: preparing separate first and second substrates, the first substrate having a first surface on which a first structural body having a first height and a second structural body having a second height greater than the first height of the first structural body are arranged, the second substrate having a second surface; then placing the first and second substrates to cause the first and second surfaces to face each other across the first and second structural bodies; and then bonding the first and second substrates to each other while compressing the second structural body in a height direction thereof between the first and second surfaces to cause the second structural body to have a height defined by the first structural body.
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