Method of manufacturing liquid ejection head and method of processing substrate

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United States of America Patent

PATENT NO 8980110
APP PUB NO 20130206723A1
SERIAL NO

13760860

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Abstract

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A liquid ejection head includes a substrate having an ejection energy generating element formed at a first surface side thereof, a common liquid chamber formed at a second surface of the substrate, and a liquid supply port extending from the bottom of the common liquid chamber to the first surface. The liquid ejection head is manufactured by preparing a substrate having the common liquid chamber formed at the second surface side, then arranging a material to be filled in the common liquid chamber, subsequently forming an aperture in the filled material as corresponding to the liquid supply port to be formed, and thereafter forming the liquid supply port by reactive ion etching, using at least the filled material as a mask.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayakawa, Kazuhiro Inagi, JP 50 351
Sakai, Toshiyasu Kawasaki, JP 64 1420
Watanabe, Masahisa Yokohama, JP 56 778

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