Film removing method, nozzle for removing film, and film removing device
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United States of America Patent
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Mar 17, 2015
Grant Date -
Feb 13, 2014
app pub date -
Apr 11, 2012
filing date -
Apr 26, 2011
priority date (Note) -
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Abstract
A film in a dry state is efficiently dissolved and removed. A film removing method includes steps of moving a nozzle head (10B) close to a soluble film (201) formed on a substrate (200), forming a liquid pool (302) of chemical liquid (300) between the nozzle head (10B) and the film (201) by continuously and simultaneously discharging and sucking the chemical liquid (300) from the nozzle head (10B), and horizontally moving the substrate (100) in a state in which the nozzle head (10B) and the surface of the film (201) are not contacted so as to relatively move the liquid pool (302) of the chemical liquid on the substrate (100).
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