Optical module and optical measurement device
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United States of America Patent
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Mar 17, 2015
Grant Date -
May 31, 2012
app pub date -
Nov 2, 2011
filing date -
Nov 25, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
An optical module comprising a tunable interference filter including a first substrate, a second substrate facing the first substrate, a first reflective film formed on the first substrate, a second reflective film formed on the second substrate and facing the first reflective film, a gap changing unit changing a gap between the first reflective film and the second reflective film, and a driving electrode line electrically connected to the gap changing unit, a temperature sensor detecting temperature of the tunable interference filter and including a first sensor wiring and a second sensor wiring, the first sensor wiring being electrically connected to the driving electrode line, a switch electrically connected to the second sensor wiring, and a temperature detecting circuit electrically connected to the switch.
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