Methods and apparatus for sealing a slit valve door

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8991785
APP PUB NO 20090108544A1
SERIAL NO

12256458

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Apparatus, methods and systems are provided for sealing the door of a slit valve. In one embodiment, the apparatus includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along the length of the seal, wherein the hard stop and elastomer seal fill at least a portion of a gap between the slit valve door and an insert leading to a process chamber.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.;METABASIS THERAPEUTICS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rice, Michael R Pleasanton, US 167 3157
Sico, Angela Rose Round Rock, US 1 36
Strassner, James D Austin, US 24 66

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