Method for manufacturing mold
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United States of America Patent
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Mar 31, 2015
Grant Date -
Sep 19, 2013
app pub date -
Feb 28, 2013
filing date -
Mar 16, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
According to one embodiment, a method is disclosed for manufacturing a mold. The method can include forming a second major surface receded from a first major surface by irradiating a portion of the first major surface with a charged beam to etch a base material having the first major surface. The method can include forming a mask pattern on the first major surface and the second major surface. In addition, the method can include forming a first pattern on the first major surface and a second pattern on the second major surface by etching the base material through the mask pattern.
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