Silicide micromechanical device and methods to fabricate same
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United States of America Patent
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Mar 31, 2015
Grant Date -
Jan 24, 2013
app pub date -
Sep 24, 2012
filing date -
Jun 20, 2011
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Abstract
A miniaturized electro-mechanical switch includes a moveable portion having a contact configured to make, when the switch is actuated, an electrical connection between two stationary points. At least the contact is composed of a fully silicided material. A structure includes a silicon layer formed over an insulator layer and a micromechanical switch formed at least partially within the silicon layer. The micromechanical switch has a conductive structure, and where at least electrically contacting portions of the conductive structure are comprised of fully silicided material.
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