Piezoelectric device having first and second non-metal electroconductive intermediate films
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United States of America Patent
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Mar 31, 2015
Grant Date -
Feb 6, 2014
app pub date -
Aug 3, 2012
filing date -
Aug 3, 2012
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Abstract
A piezoelectric device according to the present invention is provided with a first electrode film, a first nonmetal electroconductive intermediate film provided on the first electrode film, a piezoelectric film provided on the first nonmetal electroconductive intermediate film, a second nonmetal electroconductive intermediate film provided on the piezoelectric film, and a second electrode film provided on the second nonmetal electroconductive intermediate film. A linear expansion coefficient of the first nonmetal electroconductive intermediate film is larger than those of the first electrode film and the piezoelectric film, and a linear expansion coefficient of the second nonmetal electroconductive intermediate film is larger than those of the second electrode film and the piezoelectric film.
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