Method for producing synthetic quartz glass

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United States of America Patent

PATENT NO 8997528
APP PUB NO 20130133377A1
SERIAL NO

13684381

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A known method for producing synthetic quartz glass comprises the method steps of: forming a stream of a SiO2 feedstock material which contains octamethylcyclotetrasiloxane (D4) as the main component which has a reference molecular mass assigned to it, feeding the stream to a reaction zone in which the feedstock material is converted under formation of amorphous SiO2 particles by pyrolysis or hydrolysis into SiO2, depositing the amorphous SiO2 particles on a deposition surface while forming a porous SiO2 soot body, and vitrifying the SiO2 soot body while forming the synthetic quartz glass. Starting therefrom, to enable the production of large-volume cylindrical soot bodies with outer diameters of more than 300 mm of improved material homogeneity, it is suggested according to the invention that the feedstock material contains additional components in the form of further polyalkylsiloxanes, wherein light polyalkylsiloxanes with a relative molecular mass of less than the reference molecular mass are contained with a weight fraction of at least 50 ppm, and heavy polyalkylsiloxanes with a relative molecular mass of more than the reference molecular mass are contained with a weight fraction of at least 30 ppm.

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Patent Owner(s)

  • HERAEUS QUARZGLAS GMBH & CO. KG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fabian, Heinz Grossostheim, DE 27 317
Roeper, Juergen Roitzsch, DE 5 26

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