Method to produce nanometer-sized features with directed assembly of block copolymers

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United States of America Patent

PATENT NO 8999492
SERIAL NO

12026214

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Abstract

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Methods for fabricating stamps and systems for patterning a substrate, and devices resulting from those methods are provided.

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Patent Owner(s)

  • MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Millward, Dan B Boise, US 79 3346
Sandhu, Gurtej S Boise, US 1216 32355

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