Method of manufacturing a three dimensional photonic device by two photon absorption polymerization

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United States of America Patent

PATENT NO 9002157
APP PUB NO 20130315530A1
SERIAL NO

13898869

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Abstract

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A method of manufacturing a three dimensional photonic device by two photon absorption polymerization. The method includes several stages, including direct laser writing involving polymerization by two-photon absorption to manufacture a three dimensional photonic device integrating at least two distinct micro-optical components having two optical functions and being aligned with each other so that optical signal can be transmitted from one of said distinct components to the other. The distinct components are built at a same stage of the process flow to improve their relative alignment by direct laser writing involving polymerization by two-photon absorption.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
La, Porta Antonio Zurich, CH 25 87
Offrein, Bert J Zurich, CH 30 235
Soganci, Ibrahim Murat Zurich, CH 11 82

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