Temperature compensated force sensor
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United States of America Patent
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Apr 14, 2015
Grant Date -
Nov 14, 2013
app pub date -
May 10, 2012
filing date -
May 10, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
A force sensor may include a housing having a cavity enclosing a sense die, an actuating element and an elastomeric seal. The sense die may have a force sensing element for sensing a force applied to a surface of the sense die, and a temperature compensation circuit. The temperature compensation circuit may be located on the surface of the sense die and may be configured to at least partially compensate for the temperature sensitivity of the force sensing element. The actuating element may extend outside the housing and be used to transfer a force applied externally from the housing to the sense die. The elastomeric seal may include one or more conductive elements separated from the edge of the elastomeric seal by an insulating elastomeric material.
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