Multi-analyzer angle spectroscopic ellipsometry

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United States of America Patent

PATENT NO 9007583
APP PUB NO 20130010296A1
SERIAL NO

13541176

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Abstract

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Ellipsometry systems and ellipsometry data collection methods with improved stabilities are disclosed. In accordance with the present disclosure, multiple predetermined, discrete analyzer angles are utilized to collect ellipsometry data for a single measurement, and data regression is performed based on the ellipsometry data collected at these predetermined, discrete analyzer angles. Utilizing multiple discrete analyzer angles for a single measurement improves the stability of the ellipsometry system.

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Patent Owner(s)

  • KLA-TENCOR CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dixon, Ward Livermore, US 3 7
Kaack, Torsten R Los Altos, US 7 6
Kwak, Hidong San Jose, US 14 147
Poslavsky, Leonid Belmont, US 50 255

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