Process chamber component having yttrium—aluminum coating

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United States of America Patent

PATENT NO 9012030
APP PUB NO 20120135155A1
SERIAL NO

13368255

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Abstract

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A substrate processing chamber component comprising a chamber component structure having an yttrium-aluminum coating. The yttrium-aluminum coating comprises a compositional gradient through a thickness of the coating.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Han, Nianci San Jose, US 19 1558
Shih, Hong Walnut, US 104 3498
Xu, Li San Jose, US 379 6722

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