Nanogap in-between noble metals
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United States of America Patent
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Apr 21, 2015
Grant Date -
Oct 9, 2014
app pub date -
Apr 4, 2013
filing date -
Apr 4, 2013
priority date (Note) -
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Abstract
A nanogap of controlled width in-between noble metals is produced using sidewall techniques and chemical-mechanical-polishing. Electrical connections are provided to enable current measurements across the nanogap for analytical purposes. The nanogap in-between noble metals may also be formed inside a Damascene trench. The nanogap in-between noble metals may also be inserted into a crossed slit nanopore framework. A noble metal layer on the side of the nanogap may have sub-layers serving the purpose of multiple simultaneous electrical measurements.
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