Substrate coating device that controls coating amount based on optical measurement of bead shape
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United States of America Patent
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Apr 28, 2015
Grant Date -
Jan 5, 2012
app pub date -
Mar 12, 2010
filing date -
Mar 19, 2009
priority date (Note) -
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Abstract
The substrate coating device (10) includes a slit nozzle (1), a first camera (3), a second camera (4), a control section (5), a pump (8), and a pressure control chamber (9). The control section (5) controls the supply of the coating liquid from the pump (8) to the slit nozzle (1) in accordance with the result of comparison between a bead shape imaged by the first camera (3) and a reference shape. The control section (5) also controls the air pressure on the upstream side of the slit nozzle (1) by the pressure control chamber (9) in accordance with the result of comparison between a distance measured from an image taken by the second camera (4) and a reference distance.
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