Laser ablation method and apparatus having a feedback loop and control unit
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United States of America Patent
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May 5, 2015
Grant Date -
Apr 20, 2006
app pub date -
Sep 12, 2005
filing date -
Aug 11, 2003
priority date (Note) -
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Abstract
A laser ablation method and apparatus uses a laser device to generate a pulsed laser using a laser device and to project the pulsed laser onto an ablation target to be ablated. A probe is then used to measure an indicative property of the ablation target or of the pulsed laser projected on the ablation target. A control loop is used to optimize ablation effect by generating a feedback signal according to the measured indicative property, sending the feedback signal to a control unit, and adjusting an output parameter of the pulsed laser according to the feedback signal. The measured indicative property may be a size of the laser beam spot or a material composition. The ablation, the feedback and the adjustment may be performed dynamically.
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