Tunable humidity sensor with integrated heater

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United States of America Patent

PATENT NO 9027400
APP PUB NO 20130139587A1
SERIAL NO

13310477

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A capacitive humidity sensor includes a first electrode, a humidity sensitive dielectric layer, and a second electrode. The humidity sensitive dielectric layer is between the first and the second electrodes. The humidity sensitive dielectric layer is etched at selected regions to form hollow regions between the first and second electrodes.

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Patent Owner(s)

  • STMICROELECTRONICS ASIA PACIFIC PTE LTD.;STMICROELECTRONICS PVT. LTD.;STMICROELECTRONICS S.R.L.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cherian, Suman Kerala, IN 19 302
Le, Neel Olivier Singapore, SG 75 967
Marsanne, Sebastien Singapore, SG 12 92
Poh, Boon Nam Singapore, SG 3 56
Shankar, Ravi Singapore, SG 135 1147
Vaiana, Michele San Giovanni La Punta, IT 28 126

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