XY all-directional precision alignment platform
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United States of America Patent
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May 19, 2015
Grant Date -
Nov 7, 2013
app pub date -
Aug 14, 2012
filing date -
May 3, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
An XY all-directional precision alignment platform is provided and includes an XY-axes moving platform including X-axis moving platform and Y-axis moving platform, the X-axis and Y-axis moving platforms being stacked together, and a θ-angle rotating platform, the θ-angle rotating platform stacked onto the carrier surface thereof; wherein the θ-angle rotating platform is driven to perform precise θ-angle rotation achieving 360° and is of a four-layered thickness only, achieving the goal of having a light and thin product.
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