Deposition method using an aerosol gas deposition for depositing particles on a substrate
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United States of America Patent
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May 19, 2015
Grant Date -
Jan 2, 2014
app pub date -
Jun 28, 2013
filing date -
Jun 28, 2012
priority date (Note) -
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Abstract
A deposition method includes placing fine particles in an airtight container, the fine particles being obtained by forming a coating layer on a surface of a matrix, the coating layer being more liable to be charged than the matrix with respect to a material of a conveying path, generating an aerosol of the fine particles by introducing a career gas into the airtight container, transporting the aerosol via a transfer tubing to a deposition chamber which is maintained at a pressure lower than that in the airtight container while charging the fine particles by friction with the inner surface of the transfer tubing, the transfer tubing being connected to the airtight container and having a nozzle at the tip, and depositing the charged fine particles on a substrate placed in the deposition chamber by spraying the aerosol from the nozzle.
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