Adiabatic mode-profile conversion by selective oxidation for photonic integrated circuit

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United States of America Patent

PATENT NO 9036968
SERIAL NO

13548553

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Waveguide designs and fabrication methods provide adiabatic waveguide eigen mode conversion and can be applied to monolithic vertical integration of active and passive elements in PICs. An advantage of the designs and methods is a simple fabrication procedure with only a single etching step in combination with subsequent well-controllable selective oxidation. As a result, improved manufacturability and reliability can be achieved.

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INNOLUME GMBHKONRAD-ADENAUER-ALLEE 11 DORTMUND 44263

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gubenko, Alexey Dortmund, DE 11 63
Kovsh, Alexey Munich, DE 25 204
Krestnikov, Igor Dortmund, DE 10 80
Livshits, Daniil Dortmund, DE 11 98
Mikhrin, Sergey Dortmund, DE 12 61
Wojcik, Greg Santa Clara, US 2 37

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