Polishing slurry composition

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United States of America Patent

PATENT NO 9039925
APP PUB NO 20130264515A1
SERIAL NO

13568130

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Abstract

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Provided is a polishing slurry composition, including a non-ionic surfactant represented by the following formula (1)

description='In-line Formulae' end='lead'R—(OCH2CH2)x—OH  formula (1)description='In-line Formulae' end='tail'

wherein x is an integer from 1 to 50, and R is selected from a group consisting of a C3-C50 alkyl group, a C6-C55 benzylalkyl group and a C6-C55 phenylalkyl group.

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Patent Owner(s)

Patent OwnerAddress
FERRO CORPORATION6060 PARKLAND BOULEVARD SUITE 250 MAYFIELD HEIGHTS OH 44124

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Song-Yuan Chiayi County, TW 17 105
Chen, Wei-Jung Tainan, TW 16 71
Lu, Ming-Hui Taipei, TW 10 36
Tsai, Wen-Tsai Taipei, TW 24 53
Wu, Ho-Ying New Taipei, TW 1 7

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