Composite transducer apparatus and system for processing a substrate and method of constructing the same
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United States of America Patent
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Jun 2, 2015
Grant Date -
Sep 11, 2014
app pub date -
May 19, 2014
filing date -
Jan 20, 2006
priority date (Note) -
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Abstract
An apparatus and method for processing articles utilizing acoustic energy. In one embodiment, the invention is an apparatus comprising a support; a conduit for applying a fluid to a surface of the article; and a transducer assembly comprising: a transmitting structure having a concave inner surface and a convex outer surface; a first acoustic transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure, wherein the first acoustic transducer is configured to create a first acoustically active area on the convex outer surface of the transmitting structure when the first acoustic transducer is energized; and a second acoustic transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure, wherein the second acoustic transducer is configured to create a second acoustically active area on the convex outer surface of the transmitting structure when the second acoustic transducer is energized.
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