Probe with cantilevered beam having solid and hollow sections

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United States of America Patent

PATENT NO 9052342
APP PUB NO 20130082729A1
SERIAL NO

13250756

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Abstract

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An electrically conductive probe can comprise a post to which a beam structure is attached. The beam structure can comprise a cantilevered portion that extends away from the post to a free end to which a contact structure can be attached. The cantilevered portion of the beam can include both a solid section and a hollow section. Multiple such probes can be used in a test contactor to make electrical connections with an electronic device such as a semiconductor die or dies to be tested.

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Patent Owner(s)

  • FORMFACTOR, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fan, Li Livermore, US 180 1507
Xu, Rui Livermore, US 387 1761

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