Microlithographic projection exposure apparatus illumination optics

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United States of America Patent

PATENT NO 9052611
APP PUB NO 20120081685A1
SERIAL NO

13325642

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Abstract

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Optics, such as, for example, microlithographic projection exposure apparatus illumination optics, as well as related systems, methods, components and devices are disclosed.

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Patent Owner(s)

  • CARL ZEISS SMT GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kohl, Alexander Aalen, DE 37 483

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