Automatic filtering of SEM images

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United States of America Patent

PATENT NO 9053532
SERIAL NO

14022571

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Abstract

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A method, system, and computer program product to automatically evaluate a scanning electron microscope (SEM) image are described. The method includes obtaining a source image and the SEM image taken of the source image. The method also includes evaluating the SEM image based on comparing source contours extracted from the source image and SEM contours extracted from the SEM image to determine whether the SEM image passes or fails.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Estellers, Virginia Lausanne, CH 2 5
Gabrani, Maria Thalwil, CH 44 333

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