Lithography apparatus including display unit for updating data and article manufacturing method using same

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United States of America Patent

PATENT NO 9053548
APP PUB NO 20140065548A1
SERIAL NO

13958788

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Abstract

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A lithography apparatus converts vector pattern data into bitmap data and performs writing on a substrate with a charged particle beam based on the bitmap data. Here, the lithography apparatus includes a display unit and a processing unit that causes the display unit to display an image corresponding to the bitmap data and performs processing for updating the bitmap data by changing at least one of a pixel value, dimension, and shape of the image displayed on the display unit via a graphical user interface.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sato, Chiaki Utsunomiya, JP 7 59

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