Configurable bevel etcher

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9053925
APP PUB NO 20110214687A1
SERIAL NO

13081264

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A device for cleaning a bevel edge of a semiconductor substrate. The device includes: a lower support having a cylindrical top portion; a lower plasma-exclusion-zone (PEZ) ring surrounding the outer edge of the top portion and adapted to support the substrate; an upper dielectric component opposing the lower support and having a cylindrical bottom portion; an upper PEZ ring surrounding the outer edge of the bottom portion and opposing the lower PEZ ring; and at least one radiofrequency (RF) power source operative to energize process gas into plasma in an annular space defined by the upper and lower PEZ rings, wherein the annular space encloses the bevel edge.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bailey,, III Andrew D Pleasanton, US 109 2271
Kennedy, William S Fremont, US 38 2409
Kim, Yunsang Monte Sereno, US 77 2992
Schoepp, Alan M Ben Lomond, US 39 1424
Sexton, Gregory Fremont, US 13 772

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